Gas discharge plasmas and their applications

AnnemieBogaerts^a ErikNeyts^a RenaatGijbels^a Joostvan der Mullen^b

^aUniversity of Antwerp, Department of Chemistry, Universiteitsplein 1, B-2610 Wilrijk-Antwerp, Belgium

^bEindhoven University of Technology, Department of Applied Physics, Den Dolech 2, Postbus 513, 5600 MB Eindhoven, The Netherlands

Abstract

This paper attempts to give an overview of gas discharge plasmas in a broad perspective. It is meant for plasma spectroscopists who are familiar with analytical plasmas (glow discharges, ICPs and microwave discharges), but who are not so well aware of other applications of these and related plasmas. In the first part, an overview will be given of the various types of existing gas discharge plasmas, and their working principles will be briefly explained. In the second part, the most important applications will be outlined.

Keywords

Plasma, Gas discharge, Direct current, Radio-frequency, Pulsed, Dielectric barrier discharge, Magnetron, Surface modification, Lamps, Lasers, Plasma display panels

About Gas discharge plasmas and their applications

https://www.sciencedirect.com/science/article/abs/pii/S0584854701004062